Comment svgcoat2 SNF 2009-11-02 10:01:23: SPR 955-7 Thickness test 11/02

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 2 10:01:24 PST 2009


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6898  Angstroms, Std Dev. 16 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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