Shutdown svgcoat2 SNF 2009-11-13 11:16:53: Wafer stuck on bake chuck
fnf1pal at snf.stanford.edu
fnf1pal at snf.stanford.edu
Fri Nov 13 11:16:53 PST 2009
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Comment svgcoat2 SNF 2009-11-08 14:42:24: Alarm
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Shutdown svgcoat2 SNF 2009-11-13 11:16:53: Wafer stuck on bake chuck
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Shutdown svgcoat2 SNF 2009-11-13 11:16:53: Wafer stuck on bake chuck
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