Shutdown svgcoat2 SNF 2009-10-12 12:57:47: vacuum lost in the coater

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 12 14:37:35 PDT 2009


removed broken wafer, cleaned Catch cup belts, hotplate, adjusted
 vacuum sensor , tested, ok and ready to use. 




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