Shutdown svgcoat2 SNF 2009-10-13 07:58:52: Under maintenance..........

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Oct 13 15:38:31 PDT 2009


Spindle vacuum issues. Installed rebuilt spindle assembly. Checked spindle vacuum- OK at 21 - 22 inches Hg. Installed new spin chuck.Replaced gasket on vacuum trap and tichtened up all fittings. Checked and adjusted chuck vacuum sensor to17" Hg. Checked and adjusted wafer centering. Cleaned all hotplates. Tested with dry run program- All OK. Tested with standard resist program- All OK. 




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