Problem svgcoat2 SNF 2009-10-12 18:53:03: coater not working

gsosa at gsosa at
Tue Oct 13 15:38:56 PDT 2009

Spindle vacuum issues. Installed rebuilt spindle assembly. Checked spindle vacuum- OK at 21 - 22 inches Hg. Installed new spin chuck.Replaced gasket on vacuum trap and tichtened up all fittings. Checked and adjusted chuck vacuum sensor to17" Hg. Checked and adjusted wafer centering. Cleaned all hotplates. Tested with dry run program- All OK. Tested with standard resist program- All OK. 

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