Comment svgcoat2 SNF 2009-10-21 10:01:40: 955 0.7 thickness test 10/21

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 21 10:01:42 PDT 2009


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6885  Angstroms, Std Dev. 16 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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