From mrlin at snf.stanford.edu Thu Sep 3 20:58:54 2009 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Thu, 3 Sep 2009 20:58:54 -0700 Subject: Problem svgcoat2 SNF 2009-09-03 20:58:53: splotches everywhere Message-ID: Ran 3612 1um, 16 wafers: 7 had big splotches on them (resist drip? EBR issue?). I then stripped and re-ran 5 of the 7. Again, 4 out of 5 had this problem. I ran the rest on track 1 (and stripped the 4 and re-ran on track 1). They look good. However, I noticed that the resist (after coating on the wafer) looks redder for track 2 than for track 1 (I'm using white-ish quartz wafers). I would ahve expected them to be the same color since it's the same resist. From vilanova at snf.stanford.edu Fri Sep 4 08:32:00 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Sep 2009 08:32:00 -0700 Subject: Problem svgcoat2 SNF 2009-09-03 20:58:53: splotches everywhere Message-ID: Purged Line, Cleaned a big chunk Of resist from the dispense hose, Cleaned Hotplates and Catch cups on both tracks,Refilled EBR Canisters and HMDS Canister , cleaned Belts, Cycled wafers On Both tracks , Uniformity Looks Good From vilanova at snf.stanford.edu Fri Sep 4 08:32:09 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Sep 2009 08:32:09 -0700 Subject: Comment svgcoat2 SNF 2009-08-21 13:07:09: track above spinner did not open every time Message-ID: Purged Line, Cleaned a big chunk Of resist from the dispense hose, Cleaned Hotplates and Catch cups on both tracks,Refilled EBR Canisters and HMDS Canister , cleaned Belts, Cycled wafers On Both tracks , Uniformity Looks Good From faridz at snf.stanford.edu Fri Sep 4 09:34:42 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 4 Sep 2009 09:34:42 -0700 Subject: Shutdown svgcoat2 SNF 2009-09-04 09:34:41: vapor prime stuck Message-ID: wafers getting stuck at vp. From gsosa at snf.stanford.edu Fri Sep 4 11:01:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Sep 2009 11:01:46 -0700 Subject: Shutdown svgcoat2 SNF 2009-09-04 09:34:41: vapor prime stuck Message-ID: Cleaned and lubed leadscrew assembly for wafer lifters. Cleaned the seal for the vapor prime lid. Cycled wafers with test program. All OK. From vilanova at snf.stanford.edu Mon Sep 14 09:04:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Sep 2009 09:04:22 -0700 Subject: Comment svgcoat2 SNF 2009-09-14 09:04:21: weekly Pm Completed Message-ID: From ofidaner at snf.stanford.edu Tue Sep 29 17:52:43 2009 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Tue, 29 Sep 2009 17:52:43 -0700 Subject: Problem svgcoat2 SNF 2009-09-29 17:52:43: 3612 needs replacement Message-ID: From chienyuc at snf.stanford.edu Tue Sep 29 18:23:09 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 29 Sep 2009 18:23:09 -0700 Subject: Comment svgcoat2 SNF 2009-09-29 18:23:09: 3612 changed Message-ID: Changed to an used 3612 bottle. From vilanova at snf.stanford.edu Wed Sep 30 07:27:07 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 Sep 2009 07:27:07 -0700 Subject: Problem svgcoat2 SNF 2009-09-29 17:52:43: 3612 needs replacement Message-ID: resist bottle replaced by Users. From vilanova at snf.stanford.edu Wed Sep 30 07:27:16 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 Sep 2009 07:27:16 -0700 Subject: Comment svgcoat2 SNF 2009-09-29 18:23:09: 3612 changed Message-ID: cleared. From gsosa at snf.stanford.edu Wed Sep 30 08:47:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Sep 2009 08:47:04 -0700 Subject: Comment svgcoat2 SNF 2009-09-30 08:47:03: 955-7 thickness test 09/30 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6927 Angstroms, Std Dev. 18 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.