Problem svgcoat2 SNF 2009-09-03 20:58:53: splotches everywhere

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 4 08:32:00 PDT 2009


Purged Line, Cleaned a big chunk Of resist from the dispense hose,
Cleaned Hotplates and Catch cups on both tracks,Refilled EBR 
Canisters and HMDS Canister , cleaned Belts, 
Cycled wafers On Both tracks , Uniformity Looks Good




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