Shutdown svgcoat2 SNF 2009-09-04 09:34:41: vapor prime stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Sep 4 11:01:46 PDT 2009


Cleaned and lubed leadscrew assembly for wafer lifters. Cleaned the seal for the vapor prime lid. Cycled wafers with test program. All OK.




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