Comment svgcoat2 SNF 2009-09-30 08:47:03: 955-7 thickness test 09/30

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Sep 30 08:47:04 PDT 2009


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6927  Angstroms, Std Dev. 18 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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