From mahnaz at snf.stanford.edu Fri Apr 2 10:00:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 2 Apr 2010 10:00:30 -0700 Subject: Comment svgcoat2 SNF 2010-04-02 10:00:30: cleaned all dummies Message-ID: From nharjee at snf.stanford.edu Fri Apr 9 15:11:09 2010 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Fri, 9 Apr 2010 15:11:09 -0700 Subject: Problem svgcoat2 SNF 2010-04-09 15:11:08: Uneven EBR width Message-ID: The width of the EBR region varies around the circumference of the wafer. Seems like the wafer is not being centered on the spindle. 1 um 3612 w/o VP 2 mm EBR. From ksaruta at snf.stanford.edu Fri Apr 9 19:31:42 2010 From: ksaruta at snf.stanford.edu (ksaruta at snf.stanford.edu) Date: Fri, 9 Apr 2010 19:31:42 -0700 Subject: Shutdown svgcoat2 SNF 2010-04-09 19:31:42: error occurred and wafer was broken Message-ID: running No.5 receipe, suddenly some error occurred (I'm not sure, but I guess it is transfer error) and the wafer on resist coat stage has been broken.. From vilanova at snf.stanford.edu Sun Apr 11 08:58:27 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 11 Apr 2010 08:58:27 -0700 Subject: Shutdown svgcoat2 SNF 2010-04-09 19:31:42: error occurred and wafer was broken Message-ID: Got an Email from A user , he cleaned up the broken pieces from the catch cup, He said that theres no visual damage to the system , , I guess they need track 2 for the ASML resist program, I will leave it on yellow and please run dummy wafers before ran your wafers, Hopefully everything will be fine , I will take care of it tomorrow ( monday) 12 ,2010 From vilanova at snf.stanford.edu Mon Apr 12 07:35:29 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2010 07:35:29 -0700 Subject: Problem svgcoat2 SNF 2010-04-09 15:11:08: Uneven EBR width Message-ID: cleaned catch cup and tested centering flags , cycled wafers ( program 7 , 1um ,2mmEBR, Everything Fine, cleaned the belts hotplate , cooling station, Also Adjusted a metal cassette that was out of adjustments, ok to use. From vilanova at snf.stanford.edu Mon Apr 12 07:35:37 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2010 07:35:37 -0700 Subject: Comment svgcoat2 SNF 2010-04-02 10:00:30: cleaned all dummies Message-ID: cleaned catch cup and tested centering flags , cycled wafers ( program 7 , 1um ,2mmEBR, Everything Fine, cleaned the belts hotplate , cooling station, Also Adjusted a metal cassette that was out of adjustments, ok to use. From rhenn at snf.stanford.edu Mon Apr 12 14:54:28 2010 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Mon, 12 Apr 2010 14:54:28 -0700 Subject: Problem svgcoat2 SNF 2010-04-12 14:54:27: wafer not centered Message-ID: The wafer does not seem to be correctly centered on the spinner chuck. The ebr is not uniform thickness around the wafer. From mahnaz at snf.stanford.edu Mon Apr 12 14:58:31 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 12 Apr 2010 14:58:31 -0700 Subject: Problem svgcoat2 SNF 2010-04-12 14:58:31: ebr off due to wafer not ceter Message-ID: Henry ran wafers over the weekend and there was the same issue. From vilanova at snf.stanford.edu Mon Apr 12 15:35:04 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2010 15:35:04 -0700 Subject: Problem svgcoat2 SNF 2010-04-12 14:54:27: wafer not centered Message-ID: checked Chuck centering devic,e adjusted and tested, Cycled 6 wafers EBR looks Good Ok to use. From vilanova at snf.stanford.edu Mon Apr 12 15:35:11 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2010 15:35:11 -0700 Subject: Problem svgcoat2 SNF 2010-04-12 14:58:31: ebr off due to wafer not ceter Message-ID: checked Chuck centering devic,e adjusted and tested, Cycled 6 wafers EBR looks Good Ok to use. From hongyuc at snf.stanford.edu Mon Apr 12 17:04:08 2010 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Mon, 12 Apr 2010 17:04:08 -0700 Subject: Problem svgcoat2 SNF 2010-04-12 17:04:08: 3um PR Message-ID: I ran program 4: 3 um w/o VP 2mm EBR on Track 2 for litho qual. Before coating the good wafers, I cleaned the nozzles with 5 dummies and ran two dummies. The result shoed the EBR is not even and the 3um PR coating is not uniform. From gsosa at snf.stanford.edu Tue Apr 13 09:29:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Apr 2010 09:29:01 -0700 Subject: Comment svgcoat2 SNF 2010-04-13 09:29:00: 955-7 0.7 thickness 4/13 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6869 Angstroms, Std Dev. 17 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From mahnaz at snf.stanford.edu Tue Apr 13 11:58:45 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 13 Apr 2010 11:58:45 -0700 Subject: Problem svgcoat2 SNF 2010-04-12 17:04:08: 3um PR Message-ID: I think that Gary and Mario worked on the issue. i cleaned nozell and ran dummies. My test came out okay, thickness 30100A. the EBR looks good but I see issue that in few hours can go out. part of the problem is the way the arm open and close so hard. back of the wafer clean but I got few big drops on the sample. Keeping it for few days if any one likes to take a look at it. From gsosa at snf.stanford.edu Fri Apr 23 10:29:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Apr 2010 10:29:08 -0700 Subject: Shutdown svgcoat2 SNF 2010-04-23 10:29:07: Carriage problem Message-ID: From gsosa at snf.stanford.edu Fri Apr 23 11:17:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Apr 2010 11:17:08 -0700 Subject: Shutdown svgcoat2 SNF 2010-04-23 10:29:07: Carriage problem Message-ID: Guide cable pulley on coater carriage came off. Found and reinstalled the pulley and retensioned guide cable. Checked and adjusted wafer centering. Checked and calibrated EBR width. Tested track operation- All OK. From gsosa at snf.stanford.edu Fri Apr 23 11:17:14 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Apr 2010 11:17:14 -0700 Subject: Comment svgcoat2 SNF 2010-04-17 10:29:38: Message-ID: Guide cable pulley on coater carriage came off. Found and reinstalled the pulley and retensioned guide cable. Checked and adjusted wafer centering. Checked and calibrated EBR width. Tested track operation- All OK. From pnataraj at snf.stanford.edu Sat Apr 24 16:23:40 2010 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sat, 24 Apr 2010 16:23:40 -0700 Subject: Problem svgcoat2 SNF 2010-04-24 16:23:39: wont work Message-ID: says" track carriage is out" From vilanova at snf.stanford.edu Mon Apr 26 07:51:30 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Apr 2010 07:51:30 -0700 Subject: Shutdown svgcoat2 SNF 2010-04-26 07:51:30: Broken Pulley Message-ID: From vilanova at snf.stanford.edu Mon Apr 26 11:18:50 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Apr 2010 11:18:50 -0700 Subject: Problem svgcoat2 SNF 2010-04-24 16:23:39: wont work Message-ID: Replaced broken Pulley Cycled wafers, Ok to use. From vilanova at snf.stanford.edu Mon Apr 26 11:18:59 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Apr 2010 11:18:59 -0700 Subject: Shutdown svgcoat2 SNF 2010-04-26 07:51:30: Broken Pulley Message-ID: Replaced broken Pulley Cycled wafers, Ok to use. From mahnaz at snf.stanford.edu Tue Apr 27 15:50:49 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:50:49 -0700 Subject: Problem svgcoat2 SNF 2010-04-27 15:50:48: NON uniformity Message-ID: Checking 1 um 3612 some of the wafers EBR Strikes. The ebr is not centered and the with is more than 3 .5 mm. !.6 um 3612 non uniformity in the center. 3 um 220-3 the non uniformity is more obvious. From vilanova at snf.stanford.edu Wed Apr 28 14:17:49 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Apr 2010 14:17:49 -0700 Subject: Comment svgcoat2 SNF 2010-04-28 14:17:48: Receiver Indexer didnt want to work properly Message-ID: From vilanova at snf.stanford.edu Wed Apr 28 14:19:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Apr 2010 14:19:13 -0700 Subject: Comment svgcoat2 SNF 2010-04-28 14:17:48: Receiver Indexer didnt want to work properly Message-ID: Mary C , called m eUp to let me know that the receiver Indexer wawsnt working properly , I reseted track and ran her wafers and then I cycled dummy wafers everytihng back to normal ,ok to use. From vilanova at snf.stanford.edu Thu Apr 29 13:21:32 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Apr 2010 13:21:32 -0700 Subject: Problem svgcoat2 SNF 2010-04-27 15:50:48: NON uniformity Message-ID: Adjusted EBR to 2mm Gap to front track and also to track #2 Cleaned Resist dispense hoses and cycled wafers, the Uniformity looks Good , please ru at least 2 to 3 dummy wafers In case the line has an air bubble. Ok to use. From mahnaz at snf.stanford.edu Fri Apr 30 17:00:28 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 Apr 2010 17:00:28 -0700 Subject: Problem svgcoat2 SNF 2010-04-30 17:00:27: 1 um wo/vp 2mm ebr Message-ID: After running 3 dummies, out of 3 wafers two wafers came out with one mm ebr and not centered.