Problem svgcoat2 SNF 2010-04-09 15:11:08: Uneven EBR width

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Fri Apr 9 15:11:09 PDT 2010


The width of the EBR region varies around the circumference of the wafer. Seems like the wafer is not being centered on the spindle. 1 um 3612 w/o VP 2 mm EBR.




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