Shutdown svgcoat2 SNF 2010-04-09 19:31:42: error occurred and wafer was broken

ksaruta at snf.stanford.edu ksaruta at snf.stanford.edu
Fri Apr 9 19:31:42 PDT 2010


running No.5 receipe, suddenly some error occurred (I'm not sure, but I guess it is transfer error) and the wafer on resist coat stage has been broken..




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