Shutdown svgcoat2 SNF 2010-04-09 19:31:42: error occurred and wafer was broken

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Apr 11 08:58:27 PDT 2010


Got an Email from A user , he cleaned up the broken pieces from the 
catch cup, He said that theres no visual damage to the system , ,
 I guess they  need track 2 for the ASML resist program, I will leave it on yellow and please run dummy wafers before ran your wafers, 
Hopefully everything will be fine , I will take care of it tomorrow ( monday)
12 ,2010




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