Shutdown svgcoat2 SNF 2010-04-09 19:31:42: error occurred and wafer was broken

[vilanova at snf.stanford.edu]

Got an Email from A user , he cleaned up the broken pieces from the 
catch cup, He said that theres no visual damage to the system , ,
 I guess they  need track 2 for the ASML resist program, I will leave it on yellow and please run dummy wafers before ran your wafers, 
Hopefully everything will be fine , I will take care of it tomorrow ( monday)
12 ,2010