Problem svgcoat2 SNF 2010-04-09 15:11:08: Uneven EBR width

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 12 07:35:29 PDT 2010


cleaned catch cup and tested centering flags , cycled wafers 
( program 7 , 1um ,2mmEBR, Everything Fine, cleaned the belts 
hotplate , cooling station, Also Adjusted a metal cassette that was
out of adjustments, ok to use. 




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