Problem svgcoat2 SNF 2010-04-12 14:54:27: wafer not centered

rhenn at snf.stanford.edu rhenn at snf.stanford.edu
Mon Apr 12 14:54:28 PDT 2010

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The wafer does not seem to be correctly centered on the spinner chuck. The ebr is not uniform thickness around the wafer.

Previous message: Shutdown svgcoat2 SNF 2010-04-09 19:31:42: error occurred and wafer was broken
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