Problem svgcoat2 SNF 2010-04-12 14:58:31: ebr off due to wafer not ceter

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 12 15:35:11 PDT 2010


checked Chuck centering  devic,e adjusted and tested, Cycled 6 wafers 
EBR looks Good Ok to use. 




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