Problem svgcoat2 SNF 2010-04-12 17:04:08: 3um PR

hongyuc at snf.stanford.edu hongyuc at snf.stanford.edu
Mon Apr 12 17:04:08 PDT 2010


I ran program 4: 3 um w/o VP 2mm EBR on Track 2 for litho qual. Before coating the good wafers, I cleaned the nozzles with 5 dummies and ran two dummies. The result shoed the EBR is not even and the 3um  PR coating  is not uniform.




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