Problem svgcoat2 SNF 2010-04-12 17:04:08: 3um PR

[hongyuc at snf.stanford.edu]

I ran program 4: 3 um w/o VP 2mm EBR on Track 2 for litho qual. Before coating the good wafers, I cleaned the nozzles with 5 dummies and ran two dummies. The result shoed the EBR is not even and the 3um  PR coating  is not uniform.