Problem svgcoat2 SNF 2010-04-12 17:04:08: 3um PR

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Apr 13 11:58:45 PDT 2010


I think that Gary and Mario worked on the issue.
i cleaned nozell and ran dummies.
My test came out okay, thickness 30100A. the EBR looks good but I see issue that in few hours can go out. part of the problem is the way the arm open and close so hard.
back of the wafer clean but I got few big drops on the sample.
Keeping it for few days if any one likes to take a look at it.




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