Shutdown svgcoat2 SNF 2010-04-23 10:29:07: Carriage problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 23 11:17:08 PDT 2010


Guide cable  pulley on coater carriage came off. Found and reinstalled the pulley and retensioned guide cable. Checked and adjusted wafer centering. Checked and calibrated EBR width. Tested track operation- All OK. 




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