Problem svgcoat2 SNF 2010-04-27 15:50:48: NON uniformity

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Apr 27 15:50:49 PDT 2010


Checking 1 um 3612 some of the wafers EBR Strikes. The ebr is not centered and the with is more than 3 .5 mm.
!.6 um 3612 non uniformity in the center.
3 um 220-3 the non uniformity is more obvious.




More information about the svgcoat2-pcs mailing list