Problem svgcoat2 SNF 2010-04-27 15:50:48: NON uniformity

mahnaz at mahnaz at
Tue Apr 27 15:50:49 PDT 2010

Checking 1 um 3612 some of the wafers EBR Strikes. The ebr is not centered and the with is more than 3 .5 mm.
!.6 um 3612 non uniformity in the center.
3 um 220-3 the non uniformity is more obvious.

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