Problem svgcoat2 SNF 2010-04-27 15:50:48: NON uniformity

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 29 13:21:32 PDT 2010


Adjusted EBR to 2mm Gap to front track and also to track #2 
Cleaned    Resist dispense hoses and cycled wafers, the Uniformity 
looks Good , please  ru at least 2 to 3 dummy wafers In case the line
 has an air bubble. Ok to use. 




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