Problem svgcoat2 SNF 2010-04-30 17:00:27: 1 um wo/vp 2mm ebr

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Apr 30 17:00:28 PDT 2010


After running 3 dummies, out of 3 wafers two wafers came out with one mm ebr and not centered.




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