Problem svgcoat2 SNF 2010-08-05 13:24:37: track stuck. system doesn't start

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 5 13:53:44 PDT 2010


found HMDS hotplate full of resist residues, Cleaned and adjusted hotplate rails, cycled wafers, ok to use. 




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