Problem svgcoat2 SNF 2010-08-06 12:14:40: red spot on the chuck

rostam at snf.stanford.edu rostam at snf.stanford.edu
Fri Aug 6 12:14:40 PDT 2010


There is a red spot at the center of the chuck. I tried to remove it with acetone and IPA. It didn't come off. It leaves stains on the back of the wafer.




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