Problem svgcoat2 SNF 2010-08-06 17:01:57: Disp1 bubble

jparker at snf.stanford.edu jparker at snf.stanford.edu
Fri Aug 6 17:01:57 PDT 2010


Large (~1/3 cm long) bubble gets sucked back into dispense 1 line after dispense. Happened on 3 of 3 test wafers running program 7 (1um 3612).




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