Problem svgcoat2 SNF 2010-08-06 12:14:40: red spot on the chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 9 09:03:44 PDT 2010


Purged Line for 3612 , Uniformity Looks Good no air bubble in the 
line cleaned resist residues from chuck, theres still a small 
residue on the chuck that I couldnt remove but the wafers are coming
out clean , Also I cleaned chuck  On SVGcoat # 1 , cleaned the catch
cup cycled wafers ok to use, 




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