Problem svgcoat2 SNF 2010-08-06 17:01:57: Disp1 bubble

vilanova at vilanova at
Mon Aug 9 09:03:50 PDT 2010

Purged Line for 3612 , Uniformity Looks Good no air bubble in the 
line cleaned resist residues from chuck, theres still a small 
residue on the chuck that I couldnt remove but the wafers are coming
out clean , Also I cleaned chuck  On SVGcoat # 1 , cleaned the catch
cup cycled wafers ok to use, 

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