Problem svgcoat2 SNF 2010-08-10 19:29:52: arm not coming up on its own

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Tue Aug 10 19:29:53 PDT 2010


dispense arm isn't coming up on its own.  it comes up with a little help and moves side to side just fine (and goes down fine).  was doing it a lot, but would occasionally work without trouble (maybe 1 of every 5 wafers it would work).  tool is still operable, but needs babysitting.  




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