Problem svgcoat2 SNF 2010-08-10 19:29:52: arm not coming up on its own

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 11 11:38:16 PDT 2010


Cycled at least 25 wafers through the system. Could not reproduce the problem. Cleaned the coater bowl and belts. Checked Backside rinse with glass wafer- All OK. Pumped out internal waste container.




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