Problem svgcoat2 SNF 2010-08-10 19:29:52: arm not coming up on its own

gsosa at gsosa at
Wed Aug 11 11:38:16 PDT 2010

Cycled at least 25 wafers through the system. Could not reproduce the problem. Cleaned the coater bowl and belts. Checked Backside rinse with glass wafer- All OK. Pumped out internal waste container.

More information about the svgcoat2-pcs mailing list