Problem svgcoat2 SNF 2010-08-19 12:21:06: Bubble on suck back

luckys at snf.stanford.edu luckys at snf.stanford.edu
Thu Aug 19 12:21:06 PDT 2010


Dispense 1 ....3 of 3 wafers had a bubble in the nozzle. Program 8 for 1.6um thickness. Please fix it!!!




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