Problem svgcoat2 SNF 2010-08-20 10:11:10: belt not moving

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Aug 20 12:05:40 PDT 2010


User processed wafers successfuly after track reset.. Checked wafer transfer with test wafers. Also processed 12 silicon wafers with 955 0.7 process. No alarms or interruptions during wafer processing.. Track tested OK. Inspected wafers. Front and backside EBR good. Spin quality good, centering good. No backside contamination. Track OK. 




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