Comment svgcoat2 SNF 2010-08-20 12:08:14: 955 0.7 thickness 8/20

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Aug 20 12:08:15 PDT 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6897  Angstroms, Std Dev. 13 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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