Problem svgcoat2 SNF 2010-08-21 05:28:34: prog8 1.6um resist globs on wafer

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Sat Aug 21 05:28:35 PDT 2010


ran prog8 1.6um 5mm EBR... wafers end up with globs of resist dropped on edge of wafer, makes track dirty, i cleaned up as much as possible




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