Problem svgcoat2 SNF 2010-08-21 05:28:34: prog8 1.6um resist globs on wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 23 07:53:37 PDT 2010


someone change the resist bottle and left the Syphon TUbe( the TUbe that goes into the resist bottle ) Almost out  so therefore the System
 was nt working properly , there was a lot of bubbles and suck back 
wasnt working at all, Pushed the TUbing all the way in , cycled wafers
Uniformity Look good, Ok to use. 




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