Problem svgcoat2 SNF 2010-08-23 06:01:50: 3612 resist dropping on wafer during coating
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Aug 23 07:53:48 PDT 2010
someone change the resist bottle and left the Syphon TUbe( the TUbe that goes into the resist bottle ) Almost out so therefore the System
was nt working properly , there was a lot of bubbles and suck back
wasnt working at all, Pushed the TUbing all the way in , cycled wafers
Uniformity Look good, Ok to use.
More information about the svgcoat2-pcs
mailing list