Problem svgcoat2 SNF 2010-08-23 06:01:50: 3612 resist dropping on wafer during coating

vilanova at vilanova at
Mon Aug 23 07:53:48 PDT 2010

someone change the resist bottle and left the Syphon TUbe( the TUbe that goes into the resist bottle ) Almost out  so therefore the System
 was nt working properly , there was a lot of bubbles and suck back 
wasnt working at all, Pushed the TUbing all the way in , cycled wafers
Uniformity Look good, Ok to use. 

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