Problem svgcoat2 SNF 2010-08-30 11:44:59: 3612 Dripping............

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 30 11:44:59 PDT 2010


The 3612 Line is dripping , I've changed the Suck Back Valve but I still
See the problem, I also replaced the solenoid air line  and adjusted 
Suck Back, I need to run more wafers to see If I can trace the problem ,AS OF RIGHT NOW AVOID USING THE 3612 RESIST PROGRAMS .




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