Problem svgcoat2 SNF 2010-08-29 08:49:51: Same problem : 3612 nozzle drip

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 31 14:23:49 PDT 2010


Continued working on dripping problem with 3612 resist. Replaced suckback valve- still same. Replaced resist pump and purgede lines. Checked and adjusted suckback- all looks OK. Checked spin quality and thickness-OK
  1.6um   Mean 1718 A  Std Dev 11 A
  1.0 um Mean 100333 A  Std Dev 16 A
Coated 10 wafers with standard 1.0 micron program. All wafers look good( No visible defects, Top EBR good, Backside clean). system is OK to use




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