Problem svgcoat2 SNF 2010-08-27 17:15:35: 3612 nozzle DRIPS

gsosa at gsosa at
Tue Aug 31 14:23:54 PDT 2010

Continued working on dripping problem with 3612 resist. Replaced suckback valve- still same. Replaced resist pump and purgede lines. Checked and adjusted suckback- all looks OK. Checked spin quality and thickness-OK
  1.6um   Mean 1718 A  Std Dev 11 A
  1.0 um Mean 100333 A  Std Dev 16 A
Coated 10 wafers with standard 1.0 micron program. All wafers look good( No visible defects, Top EBR good, Backside clean). system is OK to use

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