Problem svgcoat2 SNF 2010-08-31 15:53:53: 220-3 nonuniform

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Aug 31 15:53:53 PDT 2010


I cleaned the nozzle and ran 3 dummies the uniformity in the center of wafers on two product wfs is out.
I ran prog 4.
either the chuck is not centered or the nozzle does not go to the center of wafers.




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