Problem svgcoat2 SNF 2010-08-31 15:53:53: 220-3 nonuniform

[mahnaz at snf.stanford.edu]

I cleaned the nozzle and ran 3 dummies the uniformity in the center of wafers on two product wfs is out.
I ran prog 4.
either the chuck is not centered or the nozzle does not go to the center of wafers.