From vilanova at snf.stanford.edu Wed Dec 1 08:47:50 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Dec 2010 08:47:50 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 19:11:00: leaving streaks Message-ID: I wasnt sure if it was program # 5 or 7 but I checked all 3 dispense programs, adjusted the chuck and cleaned the dispense hose cycled wafers and uniformity looks good, I will run more wafers this afternoon to see if is consistence. From jparker at snf.stanford.edu Wed Dec 8 10:05:28 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 8 Dec 2010 10:05:28 -0800 Subject: Comment svgcoat2 SNF 2010-12-08 10:05:26: 3612 caution Message-ID: 2 short audible alarm chirps on first 4 of 7 wafers while using dispense 1. Recommend double checking audible alarm is on and running more dummies than usual if the machine's been idle for a while (1hr+). From vilanova at snf.stanford.edu Wed Dec 8 13:55:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Dec 2010 13:55:20 -0800 Subject: Comment svgcoat2 SNF 2010-12-08 10:05:26: 3612 caution Message-ID: Cycled DUmmy wafers, 3612 , 1.6 um Recipe, I found small bubble In the line , Purged Line and Cycled more wafers, NO alarms System Ok to use. From gsosa at snf.stanford.edu Fri Dec 10 10:46:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Dec 2010 10:46:17 -0800 Subject: Comment svgcoat2 SNF 2010-12-10 10:46:17: 955 0.7 thickness test 12/10 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6826 Angstroms, Std Dev. 10 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From damodei at snf.stanford.edu Sun Dec 12 19:39:19 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Sun, 12 Dec 2010 19:39:19 -0800 Subject: Problem svgcoat2 SNF 2010-12-12 19:39:19: something wrong with transfer to vapor prime station Message-ID: I tried resetting it several times, every time it alarms and wafers won't transfer.