Problem svgcoat2 SNF 2010-11-30 19:11:00: leaving streaks

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Dec 1 08:47:50 PST 2010


I wasnt sure if it was program # 5 or 7 but I checked all 3 dispense
programs, adjusted the chuck and cleaned the dispense hose
cycled wafers and uniformity looks good, I will run more wafers this
afternoon to see if is consistence. 




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