Comment svgcoat2 SNF 2010-12-08 10:05:26: 3612 caution

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Dec 8 13:55:20 PST 2010


Cycled DUmmy wafers, 3612 , 1.6 um Recipe, I found small bubble
In the line , Purged Line and Cycled more wafers, NO alarms
System Ok to use. 




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