Comment svgcoat2 SNF 2010-12-10 10:46:17: 955 0.7 thickness test 12/10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Dec 10 10:46:17 PST 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6826  Angstroms, Std Dev. 10 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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