Problem svgcoat2 SNF 2010-12-12 19:39:19: something wrong with transfer to vapor prime station

damodei at snf.stanford.edu damodei at snf.stanford.edu
Sun Dec 12 19:39:19 PST 2010

Previous message: Comment svgcoat2 SNF 2010-12-10 10:46:17: 955 0.7 thickness test 12/10
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I tried resetting it several times, every time it alarms and wafers won't transfer.

Previous message: Comment svgcoat2 SNF 2010-12-10 10:46:17: 955 0.7 thickness test 12/10
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