From ocakkaya at snf.stanford.edu Mon Feb 1 21:55:10 2010 From: ocakkaya at snf.stanford.edu (ocakkaya at snf.stanford.edu) Date: Mon, 1 Feb 2010 21:55:10 -0800 Subject: Problem svgcoat2 SNF 2010-02-01 21:55:09: The coater rail on Track 2 does not open itself Message-ID: From vilanova at snf.stanford.edu Tue Feb 2 08:29:50 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Feb 2010 08:29:50 -0800 Subject: Problem svgcoat2 SNF 2010-02-01 21:55:09: The coater rail on Track 2 does not open itself Message-ID: Lubricated the arms ( open and close ) and cycled wafers, arm system working fine, Ok to use. - From cmcg at snf.stanford.edu Sat Feb 6 13:18:54 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 6 Feb 2010 13:18:54 -0800 Subject: Problem svgcoat2 SNF 2010-02-06 13:18:53: track getting stuck Message-ID: prior to spin coat the track arms have been getting stuck occasionally and are not retracting so the wafer can be taken down into the coat bin resulting in alarm. From jaehlee at snf.stanford.edu Sat Feb 6 15:44:39 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Sat, 6 Feb 2010 15:44:39 -0800 Subject: Problem svgcoat2 SNF 2010-02-06 15:44:39: track getting stuck Message-ID: I ran a few dummy wafers and dummys are currently stuck in the track. From pnataraj at snf.stanford.edu Sat Feb 6 20:31:28 2010 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sat, 6 Feb 2010 20:31:28 -0800 Subject: Comment svgcoat2 SNF 2010-02-06 20:31:28: broken wafer at prime station Message-ID: I removed the wafer and cleaned the prime station. I put the cap back on, but not sure from HMDS won't leak or not. It is okay to only spin resist !! ( use yes oven for prime) From vilanova at snf.stanford.edu Mon Feb 8 08:46:25 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:46:25 -0800 Subject: Comment svgcoat2 SNF 2010-02-06 20:31:28: broken wafer at prime station Message-ID: adjusted HMDS station and cleaned hotplate , cycled wafers Ok to use. From vilanova at snf.stanford.edu Mon Feb 8 08:51:06 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:51:06 -0800 Subject: Shutdown svgcoat2 SNF 2010-02-08 08:51:05: repairs In progress.... Message-ID: We are repairng the Issues with the Arm coat ( open and closing ) , Sorry for the inconvinience , Stay tuned for updates. From gsosa at snf.stanford.edu Mon Feb 8 10:36:51 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Feb 2010 10:36:51 -0800 Subject: Shutdown svgcoat2 SNF 2010-02-08 08:51:05: repairs In progress.... Message-ID: Replaced the carriage in/out solinoid. Tested track operation. All OK. From gsosa at snf.stanford.edu Mon Feb 8 10:37:28 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Feb 2010 10:37:28 -0800 Subject: Problem svgcoat2 SNF 2010-02-06 15:44:39: track getting stuck Message-ID: Replaced the carriage in/out solinoid. Tested track operation. All OK. From gsosa at snf.stanford.edu Mon Feb 8 10:37:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Feb 2010 10:37:33 -0800 Subject: Problem svgcoat2 SNF 2010-02-06 13:18:53: track getting stuck Message-ID: Replaced the carriage in/out solinoid. Tested track operation. All OK. From kuanlinc at snf.stanford.edu Wed Feb 10 13:47:16 2010 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Wed, 10 Feb 2010 13:47:16 -0800 Subject: Problem svgcoat2 SNF 2010-02-10 13:47:15: particles on coated wafer Message-ID: The catch cup is pretty dirty and some random particles shown on the coated wafer. From vilanova at snf.stanford.edu Wed Feb 10 14:37:51 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Feb 2010 14:37:51 -0800 Subject: Problem svgcoat2 SNF 2010-02-10 13:47:15: particles on coated wafer Message-ID: cleaned catch cup hotplate and belts, cycled wafers , Uniformity Looks Good and bottom Wafers are coming out clean. From king at snf.stanford.edu Thu Feb 11 19:53:04 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 11 Feb 2010 19:53:04 -0800 Subject: Problem svgcoat2 SNF 2010-02-11 19:53:04: SVG Track 2 - 3612 dispense Message-ID: It keeps getting huge bubble in the line. I switched to Track 1 and didn't try to fix it. From gsosa at snf.stanford.edu Fri Feb 12 12:20:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Feb 2010 12:20:27 -0800 Subject: Problem svgcoat2 SNF 2010-02-11 19:53:04: SVG Track 2 - 3612 dispense Message-ID: Purged air out of dispense line. Tested OK. From lindaw at snf.stanford.edu Fri Feb 12 13:11:28 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 12 Feb 2010 13:11:28 -0800 Subject: Problem svgcoat2 SNF 2010-02-12 13:11:27: broken wafer in spin bowl Message-ID: For some reason, 1 wafer out of 12 loaded off center on the spin chuck and broke apart during very loud unbalanced spin cycle. The wafer right after loaded just fine on the spin chuck. From ajamo at snf.stanford.edu Sun Feb 14 21:21:57 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 14 Feb 2010 21:21:57 -0800 Subject: Problem svgcoat2 SNF 2010-02-14 21:21:57: EBR program 4 Message-ID: I ran 13 wafers using prog 4 4umw/oVP and on some (not all) wafers it looked like the EBR had dripped at the edge of the wafers. It didn't look like a resist spin defect, more like a possible EBR problem. From vilanova at snf.stanford.edu Tue Feb 16 08:12:19 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Feb 2010 08:12:19 -0800 Subject: Problem svgcoat2 SNF 2010-02-12 13:11:27: broken wafer in spin bowl Message-ID: cleaned catch cup and removed broken wafer pieces, Cycled wafers ( program 4 , 7, 5, ) and EBR looks Good, Also checked wafers centering position cycled wafers , wafer centering Looks within spec. Cleaned dummy wafers Ok to use. From vilanova at snf.stanford.edu Tue Feb 16 08:12:28 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Feb 2010 08:12:28 -0800 Subject: Comment svgcoat2 SNF 2010-01-29 10:11:27: cleaned all the dummies Message-ID: cleaned catch cup and removed broken wafer pieces, Cycled wafers ( program 4 , 7, 5, ) and EBR looks Good, Also checked wafers centering position cycled wafers , wafer centering Looks within spec. Cleaned dummy wafers Ok to use. From vilanova at snf.stanford.edu Tue Feb 16 08:12:35 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Feb 2010 08:12:35 -0800 Subject: Problem svgcoat2 SNF 2010-02-14 21:21:57: EBR program 4 Message-ID: cleaned catch cup and removed broken wafer pieces, Cycled wafers ( program 4 , 7, 5, ) and EBR looks Good, Also checked wafers centering position cycled wafers , wafer centering Looks within spec. Cleaned dummy wafers Ok to use. From damodei at snf.stanford.edu Fri Feb 19 15:46:18 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Fri, 19 Feb 2010 15:46:18 -0800 Subject: Problem svgcoat2 SNF 2010-02-19 15:46:16: Resist on back of wafers Message-ID: Running 3612, streaks of resist showing up on back of wafer. From grahamab at snf.stanford.edu Sun Feb 21 19:30:54 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 21 Feb 2010 19:30:54 -0800 Subject: Problem svgcoat2 SNF 2010-02-21 19:30:53: coater conveyer belt not going in on its own Message-ID: track alarms and you need to give the conveyer belt support a little push to help it in. From vilanova at snf.stanford.edu Mon Feb 22 09:07:02 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Feb 2010 09:07:02 -0800 Subject: Problem svgcoat2 SNF 2010-02-19 15:46:16: Resist on back of wafers Message-ID: Cycled anc cleaned all the dummy wafers , I couldnt repeat the User problem the back of the wafers are nice and clean, Also the Belts were not working properly because he recovery waste small carboy Under the coat tracks were full and someone just turn off the alarm Instead Just empty them . Ok to use now From vilanova at snf.stanford.edu Mon Feb 22 09:07:10 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Feb 2010 09:07:10 -0800 Subject: Problem svgcoat2 SNF 2010-02-21 19:30:53: coater conveyer belt not going in on its own Message-ID: Cycled anc cleaned all the dummy wafers , I couldnt repeat the User problem the back of the wafers are nice and clean, Also the Belts were not working properly because he recovery waste small carboy Under the coat tracks were full and someone just turn off the alarm Instead Just empty them . Ok to use now From damodei at snf.stanford.edu Tue Feb 23 18:32:20 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 23 Feb 2010 18:32:20 -0800 Subject: Problem svgcoat2 SNF 2010-02-23 18:32:19: photoresist on back of wafers Message-ID: Small streaks of photoresist are being deposited on the back of every wafer by the track. They seem to be at about 5 o'clock relative to the flat, which is exactly where hotspots on the ASML have been showing up. From jsnapp at snf.stanford.edu Tue Feb 23 20:34:54 2010 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Tue, 23 Feb 2010 20:34:54 -0800 Subject: Problem svgcoat2 SNF 2010-02-23 20:34:54: resist baked onto hotplate Message-ID: Previous user ran dummy wafers resist down and glued them to the hot plates. I wiped and scrubbed everything with acetone but it still should be cleaned more before use I think. WATCHOUT! From vilanova at snf.stanford.edu Wed Feb 24 08:57:03 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Feb 2010 08:57:03 -0800 Subject: Problem svgcoat2 SNF 2010-02-23 18:32:19: photoresist on back of wafers Message-ID: Hotplate was cleaned when we got here this morning, Cleaned belts and cycled wafers, NO wet or particles , streaks on back of wafers,. Ok to use From vilanova at snf.stanford.edu Wed Feb 24 08:57:17 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Feb 2010 08:57:17 -0800 Subject: Problem svgcoat2 SNF 2010-02-23 20:34:54: resist baked onto hotplate Message-ID: Hotplate was cleaned when we got here this morning, Cleaned belts and cycled wafers, NO wet or particles , streaks on back of wafers,. Ok to use From jwpchen at snf.stanford.edu Wed Feb 24 12:33:27 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 24 Feb 2010 12:33:27 -0800 Subject: Problem svgcoat2 SNF 2010-02-24 12:33:27: receiver lifts after 1st wafer Message-ID: the receiver elevator resets index after each wafer, be warned if you have a large batch, not that you should leave stuff unattended anyway From vilanova at snf.stanford.edu Wed Feb 24 13:31:34 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Feb 2010 13:31:34 -0800 Subject: Problem svgcoat2 SNF 2010-02-24 12:33:27: receiver lifts after 1st wafer Message-ID: someone pressed the "mix Lot Start" button , Instead of the Regular Start Button, System Checked and tested, Ok to use. From vilanova at snf.stanford.edu Thu Feb 25 08:59:52 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Feb 2010 08:59:52 -0800 Subject: Comment svgcoat2 SNF 2010-02-25 08:59:52: maintenance Completed. :-) Message-ID: cleaned catch cup belts HMDS Hotplate ( super clean now ) Cleaned dummy wafers ( coat and developer ) Cleaned Post bake Hotplate, Tested ok to use. From zzp at snf.stanford.edu Thu Feb 25 18:16:39 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 25 Feb 2010 18:16:39 -0800 Subject: Problem svgcoat2 SNF 2010-02-25 18:16:39: 3612 resis. level low alarm Message-ID: From pponce at snf.stanford.edu Fri Feb 26 00:32:18 2010 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Fri, 26 Feb 2010 00:32:18 -0800 Subject: Problem svgcoat2 SNF 2010-02-26 00:32:18: Vapor Prime Fail Message-ID: The vapor prime station is triggering a vacuum error. From vilanova at snf.stanford.edu Fri Feb 26 08:34:40 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Feb 2010 08:34:40 -0800 Subject: Problem svgcoat2 SNF 2010-02-25 18:16:39: 3612 resis. level low alarm Message-ID: 1) Resist Bottle was Full, there was A bubble in the line, Purged Line and cycled wafers , Ok to use. 2) HMDS station got stuck on bottom position , Realigned carrier and Lubricated HMDS Up/Down Arm, Tested, Ok to use. From vilanova at snf.stanford.edu Fri Feb 26 08:34:47 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Feb 2010 08:34:47 -0800 Subject: Problem svgcoat2 SNF 2010-02-26 00:32:18: Vapor Prime Fail Message-ID: 1) Resist Bottle was Full, there was A bubble in the line, Purged Line and cycled wafers , Ok to use. 2) HMDS station got stuck on bottom position , Realigned carrier and Lubricated HMDS Up/Down Arm, Tested, Ok to use.