Problem svgcoat2 SNF 2010-02-01 21:55:09: The coater rail on Track 2 does not open itself

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Feb 2 08:29:50 PST 2010


Lubricated the arms ( open and close ) and cycled wafers, arm system working fine, Ok to use. -




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