Problem svgcoat2 SNF 2010-02-06 13:18:53: track getting stuck

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Sat Feb 6 13:18:54 PST 2010


prior to spin coat the track arms have been getting stuck occasionally and are not retracting so the wafer can be taken down into the coat bin resulting in alarm.




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