Comment svgcoat2 SNF 2010-02-06 20:31:28: broken wafer at prime station

pnataraj at snf.stanford.edu pnataraj at snf.stanford.edu
Sat Feb 6 20:31:28 PST 2010


I removed the wafer and cleaned the prime station.
I put the cap back on, but not sure from HMDS won't leak or not.
It is okay to only spin resist !! ( use yes oven for prime)




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