Shutdown svgcoat2 SNF 2010-02-08 08:51:05: repairs In progress....

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Feb 8 10:36:51 PST 2010

Previous message: Shutdown svgcoat2 SNF 2010-02-08 08:51:05: repairs In progress....
Next message: Problem svgcoat2 SNF 2010-02-10 13:47:15: particles on coated wafer
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Replaced the carriage in/out solinoid. Tested track operation. All OK.

Previous message: Shutdown svgcoat2 SNF 2010-02-08 08:51:05: repairs In progress....
Next message: Problem svgcoat2 SNF 2010-02-10 13:47:15: particles on coated wafer
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat2-pcs mailing list